Area of research
Electrical and Electronic Engineering · Automotive Engineering
Research interest
Research interests include Passivation, Materials science, Plasma-enhanced chemical vapor deposition, Annealing (glass), Wafer, and Getter.
Blistering-free carbon-doped polysilicon (n+) passivating contact with high surface passivation properties prepared by industrial tube PECVD
Ultrathin silicon oxide prepared by in-line plasma-assisted N2O oxidation (PANO) and the application for n-type polysilicon passivated contact
Effective gettering of in-situ phosphorus-doped polysilicon passivating contact prepared using plasma-enhanced chemical-vapor deposition technique